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Country - Finland
Summary - 200 Mm Coating And Developing Track Tool
Deadline - Apr 29, 2025
GT reference number - 106107451
Product classification - Laboratory, optical and precision equipments (excl. glasses)
Address - Finland
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 106107451
Document Type - Tender Notices
Description - Description: THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technica
Gt Ref Id - 106107451
Deadline - Apr 29, 2025
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