Ald Equipment For Meol/Beol Materials

  Address - France

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 103224817

  Document Type - Tender Notices

Description - Description: CEA-Leti wishes to acquire an ALD deposition equipment. This equipment aims to be used for the development of advanced FDSOI technologies 10 nm and beyond, and more particularly the MEOL and BEOL levels.This equipment will process 300 mm wafers. It aims at the development of dielectrics and conductive materials for embedded non-volatile memories (eNVM) at the level of metal interconnects above the transistors.It includes the following mandatory response options: - Level 1 maintenance training (page 36 of the specifications) - Advanced maintenance training ((page 36 of the specifications) As well as the cost of the optional response options: - a buffer station for wafer cooling (

Gt Ref Id - 103224817

Deadline - Mar 13, 2025