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Beol Etch Platform

Imec EU Pilot line NV Belgium has Released a tender for Beol Etch Platform in laboratory equipment and services . The tender was released on Mar 03, 2025.

Country - Belgium

Summary - Beol Etch Platform

Deadline - Mar 18, 2025

GT reference number - 104278658

Product classification - Laboratory, optical and precision equipments (excl. glasses)

Organization Details:

  Address - Belgium

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 104278658

  Document Type - Tender Notices

Notice Details and Documents:

Description - Description: The purchase of a device for removing photoresis layers at high temperature or a new Beol Etch cluster. • 300mm dry etch/strip platform with 3 process modules as described below: • metal dry etcher suitable for metal, metal oxides an d various hm (hard mask) etses • deep si etcher suitable for tsv (through silicon via) • dry stripper or asher with water vapor of passivation options Legacy technology nodes up to N3 and beyond.local title:: BEOL etch platformContract Type: : Supplylocal description: : De aankoop van een toestel voor het verwijderen van fotoresistlagen bij hoge temperatuur ofwel een nieuwe BEOL Etch Cluster. • 300mm Dry Etch/Strip Platform met 3 Procesmodu

Gt Ref Id - 104278658

Deadline - Mar 18, 2025

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