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Country - Belgium
Summary - Beol Etch Platform
Deadline - Mar 18, 2025
GT reference number - 104278658
Product classification - Laboratory, optical and precision equipments (excl. glasses)
Address - Belgium
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 104278658
Document Type - Tender Notices
Description - Description: The purchase of a device for removing photoresis layers at high temperature or a new Beol Etch cluster. • 300mm dry etch/strip platform with 3 process modules as described below: • metal dry etcher suitable for metal, metal oxides an d various hm (hard mask) etses • deep si etcher suitable for tsv (through silicon via) • dry stripper or asher with water vapor of passivation options Legacy technology nodes up to N3 and beyond.local title:: BEOL etch platformContract Type: : Supplylocal description: : De aankoop van een toestel voor het verwijderen van fotoresistlagen bij hoge temperatuur ofwel een nieuwe BEOL Etch Cluster. • 300mm Dry Etch/Strip Platform met 3 Procesmodu
Gt Ref Id - 104278658
Deadline - Mar 18, 2025
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