European Tender Dry Etcher

  Address - Netherlands

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 82239701

  Document Type - Tender Notices

Description - Description: The MESA+ Institute will invest in a new Dry Etch tool system to reinforce their state-of-the-art etch capabilities and etch capacity. Applications: The tool must be capable of etching silicon and/or silicon-based materials for a variety of nano- and/or microscale structures with nanometre precision and high wafer-scale uniformity. The tool must be suitable for the etching of silicon-based materials with etch rates of 1 nm/min up to 15 µm/min. The tool must be equipped with reliable end-pointing, also for loadings of < 5% open area (based on 100 mm wafer), using OES or laser interferometry. The required nanometric precision of the tool is defined as the wafer-scale controlla

Gt Ref Id - 82239701

Deadline - Jul 15, 2024