Plasmaoxidationsmodul (200Mm, Cmos) Zur Anbringung Aufdampf-Clustertool (Pr847550-2270-W)

  Address - Germany

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 100219770

  Document Type - Tender Notices

Description - Description: Description: 1 piece plasma oxidation module (200mm, CMOS) for attaching the evaporation cluster toolThe plasma oxidation module, attached to a free port of the evaporation cluster, is intended to enable the precise creation of thin oxid e layers (e.g. on Si or Al). The oxidation is plasma-assisted and therefore allows the use of low process temperatures, which is essential for the oxidation of aluminum, for example. Among other things, the quality and reproducibility of tunnel structures in quantum components is to be ensured by creating very thin (

Gt Ref Id - 100219770

Deadline - Jan 17, 2025