Providing A 248Nm Lithography Track

  Address - France

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 97188885

  Document Type - Tender Notices

Description - Description: CEA-Leti wishes to acquire a 248 nm lithography track. This equipment is intended to be used to process 300mm wafers for the development of advanced FDSOI technologies 7 nm and beyond, and more particularly the implant and BEOL levels.Th is equipment is intended to spread, develop and cure photosensitive resins and associated layers automatically. It will be interfaced to a 248 nm scanner and will have to integrate the modules necessary for optical lithography processes, and more particularly the use of a KrF scanner, developed by CEA-Leti.The envisaged market includes the following options:- Options with mandatory costing:o OPT1: Software for writing recipes offline (§3.3.1)- O

Gt Ref Id - 97188885

Deadline - Nov 22, 2024