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Country - Finland
Summary - Single Wafer Plasma Asher Tool
Deadline - Jan 20, 2025
GT reference number - 100337573
Product classification - Laboratory, optical and precision equipments (excl. glasses)
Address - Finland
Contact details - 565656565
Tender notice no. - 76454545
GT Ref Id - 100337573
Document Type - Tender Notices
Description - Description: The object of the tender process is Single wafer plasma asher tool (later also “Equipment”). The procurement object is a new 200 mm Single Wafer Plasma asher tool for the VTT Micronova cleanroom semiconductor front end. The procureme nt includes a process chamber for Polymer Removal and PR ash.The single-wafer plasma asher tool is for silicon semiconductor front-end, the tool must be compatible with industry-standard cleanroom requirements, including automated wafer handling, welded gas lines with VCR-gasket construction, particle filters, etc., and CE-compliant, with Emergency shutdown, capable processing of 200 mm including the following processes: Polymer removal PR ash (b
Gt Ref Id - 100337573
Deadline - Jan 20, 2025
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