Sources Sought Notice For High-Speed, Distributable Monte Carlo Simulation For Sem-Based Overlay Metrology

  Address - United States

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 103407290

  Document Type - Tender Notices

Description - Description: The NIST Physical Measurement Laboratory (PML), Microsystems and Nanotechnology Division (MND), CHIPS R&D Program (https://www.nist.gov/chips/metrology-community) as part of the CHIPS Act activities (Grand Challenge 5: Modeling and Simul ating Semiconductor Manufacturing Processes), is now developing imaging and measurement solutions for integrated circuit (IC) overlay metrology using a scanning electron microscope (SEM). IC production relies on measurements of the 3D size, shape, and placement of structures with atomic-level precision and repeatability. The project, titled “SEM Overlay Metrology Based on Physics Model and Artificial Intelligence,” will create a sound scienti

Gt Ref Id - 103407290

Deadline - Feb 28, 2025