Supply Of A 248 Nm Optical Lithography Scanner

  Address - France

  Contact details - 565656565

  Tender notice no. - 76454545

  GT Ref Id - 97115819

  Document Type - Tender Notices

Description - Description: CEA-Leti wishes to acquire a 248 nm optical lithography scanner. This equipment is intended to process 300mm wafers for the development of advanced FDSOI technologies 10 nm and beyond, and more particularly the metal, via and implant lev els. The envisaged market includes the following options:- Options with mandatory costing:. Option 1: Possibility of using at least 6 diffractive optical elements. Option 2: Ability to process deformed wafers with a bow between -500 µm and 350 µm. Option 3: Ability to process wafers with a thickness between 500 µm and 1 mm- Options with optional costing:. Option 4: Ability to handle transparent wafers. Option 5: Ability to finely correct wafer

Gt Ref Id - 97115819

Deadline - Nov 22, 2024